Main chamber, Load lock chamber          

8 sputtering sources in main chamber    

​Base pressure: 10 X 10 ^-9 Torr           

In-situ annealing temperature up to 800~900℃

Base Pressure: 10 X 10^-7​                                  

2 Spu​ttering Gun                                       

Gridded ion source                                   

​RF(0.6kW), DC(1kW) Power​

PR solution (AZ GXR 601 [Positive])         

Spin coating                                               

ST-FMR Mask (Planned)​

To be updated

~2T Magnetic Field (VOLTA)

~1.5T Magnetic Field ​(VOLTI)

Current and voltage biasing available

In-plane/out-of-plane rotation

vertical-axis rotation

~1.5K

~9T Magnetic Field

Sample rotation available

The FMR Kit enables precise characterization of magnetic dynamics in ferromagnetic thin films and nanostructures. 

The MOKE measurement system analyzes the magnetic properties of a sample by detecting polarization changes in reflected laser light. It consists of a laser source, optical components, a magnetic field unit, and detectors to measure magnetic hysteresis.

The NV Center Measurement System probes magnetic and quantum properties by optically detecting spin states of nitrogen-vacancy centers in diamond.